Capacitive multi-channel system for maximum resolution

capaNCDT 6500

Characteristics

  • Measuring ranges (mm):
    0.05 | 0.2 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
  • Resolution max. 0.0375nm
  • Linearity max. 0.01µm
  • Bandwidth 8.5kHz (-3dB)
  • Data rate (digital output) 7.8kHz
  • Analog output (voltage/current)
  • Ethernet, EtherCAT
  • Modular – up to 8 channels
  • External or internal preamplifier
  • User-friendly set up and configuration via web interface

Maximum resolution

Ease of use via web interface

info@micro-epsilon.in