White light interferometer for absolute distance measurement with nanometer accuracy
The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.
Characteristics
- Absolute distance measurement with nanometer precision, suitable for measuring step profiles, for example
- Multi-peak distance measurement of transparent objects
- Compact and robust sensors with large offset distance
- Measuring rate up to 6 kHz for fast measurements
- Robust controller with passive cooling
- Simple configuration via web interface
- Compact sensors also with 90° beam path
- Flexible industrial integration for quick field adjustment on site
- NEW - Now also with large offset distance - for reliable distance measurement and difficult-to-access, low areas
Absolute distance measurement with nanometer resolution
The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.
Multi-peak distance measurement
With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. In addition, the controller can calculate the glass thickness based on the distance values.
Ideal for industrial environments
Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.
Small light spot for the smallest of details and structures
The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.
Measuring multiple surfaces
The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.
NEW: Sensors with large offset distance
For safe and reliable measurements, even of difficult-to-access or low measuring points: The new IMP DS35/VAC sensor has a large offset distance, reduces interference and enables a safe distance from hot objects.
Sensors also with 90° beam path
Due to their compact size, these sensors can also be integrated into restricted spaces. With the 90° beam exit models, the required installation space depth is again significantly reduced.
Numerous models for demanding measurement tasks
| Model | Measuring range / start of measuring range | Linearity | Number of measurable layers | Fields of application |
|---|---|---|---|---|
| IMS5400-DS0.5/90/VAC | 1.5 mm / approx. 0.5 mm | ± 50 nm | - |
High-precision distance measurement in clean room environments and vacuum, e.g. measurement on coated wafers. |
| IMS5400-DS10/90/VAC | 1.5 mm / 10 mm | |||
| IMS5400-DS19 | 2.1 mm / approx. 19 mm | ± 50 nm | - | Industrial distance measurements, e.g. in precision manufacturing |
| IMS5400-DS19/VAC | Precise positioning tasks and distance measurements in clean room environments and vacuum, e.g. in display production for mask production | |||
| IMS5400-DS35/VAC |
2.1 mm / approx. 35 mm |
< ±50 nm for the first distance < ±150 nm for each additional distance |
- | Precise position monitoring in glass wafer production and for distance measurements on coated wafers. Due to their large offset distance, measurements can be taken from a safe distance and at low or difficult-to-access measuring points |
| IMS5400MP-DS35/VAC | Distance measurement: 2.1 mm / approx. 35 mm Thickness measurement: 0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 35 mm |
Up to 13 layers | ||
| IMS5400MP-DS19 | Distance measurement: 2.1 mm / approx. 19 mm Thickness measurement: 0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm |
± 50 nm for the first distance ± 150 nm for each additional distance |
Up to 13 layers | Industrial distance and thickness measurements, e.g. in flat glass production |
| IMS5400MP-DS19/VAC | Precise distance and thickness measurements in clean room environments and vacuum e.g. in display production for distance and gap measurements |
Interface and signal processing units
Modern interfaces for integration into machines and systems
The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.
