White light interferometer for absolute distance measurement with nanometer accuracy

Absolute distance measurements with maximum precision
interferoMETER IMS5400-DS
Absolute distance measurements with maximum precision

The new IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance.

  • Nanometer-precise, absolute distance measurements, suitable for step profiles
  • Multi-peak distance measurement of transparent objects
  • Compact and robust sensors with large offset distance
  • Measuring rate up to 6 kHz for high speed measurements
  • Robust controller with passive cooling
  • Easy configuration via web interface

Absolute distance measurement with nanometer resolution

The IMS5400-DS is used for high-precision displacement and distance measurements. Unlike conventional interferometers, the IMS5400-DS also enables stable measurement of step profiles. Thanks to the absolute measurement, the scanning of steps is performed with high signal stability and precision. When measuring on moving objects, the differences in height of heels, steps and depressions can thus be reliably detected.

Multi-peak distance measurement

With multi-peak distance measurement on transparent objects, up to 14 distance values are evaluated simultaneously. For example, the distance between glass and a carrier plate can be determined. In addition, the controller can calculate the glass thickness based on the distance values.

Ideal for industrial environments

Robust sensors and a controller in a metal housing make the system ideally suitable for integration into production lines. The controller can be installed in the control cabinet via DIN rail mounting and provides very stable measurement results due to active temperature compensation and passive cooling. These compact sensors are extremely space-saving and can also be integrated in confined spaces. Highly flexible fiber optic cables are available in lengths up to 10 m and allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Small light spot for the smallest of details and structures

The sensors generate a small light spot over the entire measuring range. The light spot diameter is only 10 µm and allows the detection of small details such as structures on semiconductors and miniaturized electronic components.

Measuring multiple surfaces

The interferometric measuring method enables measurements on numerous surfaces. This allows high-precision distance measurements on reflecting metals, plastics and glass.

Numerous models for demanding measurement tasks

ModelMeasuring range /
Start of measuring range
LinearityNumber of measurable layers
Fields of application
IMS5400-DS192.1 mm / approx. 19 mm±50 nm-

Industrial distance measurements
e.g. in precision manufacturing


Precise positioning tasks and distance measurements in clean room environments and vacuum e.g. in display production for mask positioning

IMS5400MP-DS19Distance measurement:
2.1 mm / approx. 19 mm
Thickness measurement:
0.01 ... 1.3 mm (for BK7, n=1.5) / approx. 19 mm
±50 nm for the first distance
±150 nm for each further distance
Up to 13 layersIndustrial distance and thickness measurement e.g. in flat glass production
IMS5400MP-DS19/VACPrecise distance and thickness measurement in clean room environments and vacuum
e.g. in display production for distance and gap measurement

Modern interfaces for integration into machines and systems

The controller offers integrated interfaces such as Ethernet, EtherCAT and RS422 as well as additional encoder connections, analog outputs, synchronization inputs and digital I/Os. When you use Micro-Epsilon's interface modules, PROFINET and EthernetIP are available. This allows the interferometer to be integrated into all control systems and production programs.

Analog RS422 Ethernet Ethercat Profinet EthernetIP

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg
+49 8542 / 168 - 0
+49 8542 / 168 - 90