Capacitive sensors for high-precision distance measurements
Capacitive sensors from Micro-Epsilon stand for maximum precision in displacement, distance, gap and thickness measurements. Various designs enable optimum integration and impress with outstanding linearity, temperature stability and resolution.
Characteristics
- World's most comprehensive and powerful sensor portfolio for various applications
- Ultra-compact sensor designs for easy integration or retrofitting
- More precision: maximum measurement accuracy, extremely high temperature and long-term stability
- Made for challenging conditions: -270 to +800 °C, UHV or strong magnetic fields
- Customization for OEM series applications
Cylindrical standard sensors
Capacitive CSx and CS-x sensors are cylindrical displacement sensors that are mounted via a circumferential or spot clamping. The CS-x models have a slightly wider housing at the optimum clamping point for simple and reproducible installation. Due to the integrated socket, the sensors are easy to plug in and can be combined with different sensor cables.
Characteristics
- Measuring ranges (mm): 0.05 | 0.2 | 0.25 | 0.5 | 0.8 | 1 | 2 | 3 | 5 | 10
- Linearity from 0.125 µm
- Resolution from 0.015 nm
- Temperature range -50 ... +200 °C
- Target diameter from Ø 3 mm
- Excellent temperature stability
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Cylindrical sensors in very compact design
CSE sensors are cylindrical displacement sensors that have a more compact design than the standard CSx and CS-x models with the same measuring range. This makes them particularly suitable for use in tight installation spaces. They are mounted using circumferential clamping or spot clamping. Depending on the measuring range, the sensors are either pluggable or equipped with an integrated sensor cable.
Characteristics
- Measuring ranges (mm): 0.1 | 0.25 | 0.5 | 1 | 1.25 | 2 | 3
- Linearity from 0.25 µm
- Resolution from 0.03 nm
- Temperature range -50 ... +200 °C
- Target diameter from Ø 3 mm
- Excellent temperature stability
- Compact design
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High-precision cylindrical sensors
Capacitive CSH sensors are cylindrical sensors for applications where maximum precision is required. They are mounted using circumferential clamping or spot clamping. The sensors also have an integrated sensor cable.
Characteristics
- Measuring ranges (mm): 0.2 | 0.5 | 1 | 1.2 | 2
- Linearity from 0.08 µm
- Resolution from 0.06 nm
- Temperature range -50 ... +200 °C
- Target diameter from Ø 7 mm
- Excellent temperature stability
Downloads
Cylindrical sensors with thread
Capacitive CSE/Mx sensors have an integrated thread. This means they can be screwed directly into place at the measurement point and are used when clamping is not possible. Due to the integrated socket, the sensors are easy to plug in and can be combined with different sensor cables.
Characteristics
- Measuring ranges (mm): 0.5 | 1.25 | 2 | 3
- Linearity from 0.25 µm
- Resolution from 0.15 nm
- Temperature range -50 ... +200 °C
- Target diameter from Ø 7 mm
- Excellent temperature stability
Downloads
Flat sensors
Capacitive CSHxFL sensors are characterized by their flat design, which enables a lower installation height compared to cylindrical models. Due to their compact design, the sensor cable is already permanently integrated. The sensors can be easily screwed into place using the mounting holes integrated in the housing.
Characteristics
- Measuring ranges (mm): 0.2 | 0.5 | 1 | 1.2 | 2 | 3
- Linearity from 0.08 µm
- Resolution from 0.06 nm
- Temperature range -50 ... +200 °C
- Target diameter from Ø 7 mm
- Excellent temperature stability
- Flat design for space-saving installation
Downloads
Gap sensors
Capacitive CSG and CSF sensors are characterized by their extremely flat PCB design and are therefore particularly suitable for gap measurements. The CSF models detect the gap on one side and are therefore suitable for applications with a static side as well as for inspection and service purposes. CSG models, on the other hand, determine the gap width on the basis of two individual distance values and therefore measure on both sides. They project freely into the gap and are always used when both sides of the gap are movable, for example between two rotating rollers.
Characteristics
- Measuring ranges (mm): 0.5 | 1 | 2 | 4 | 6
- Linearity from 0.5 µm
- Resolution from 0.15 nm
- Target diameter from approx. 10 x 10 mm
- Temperature range -50 ... (+100) +150 °C
Downloads
Cylindrical sensors for environments up to 800 °C
Capacitive CSE/HT sensors are characterized by a particularly wide temperature range of up to +800 °C. The integrated high-temperature sensor cable compensates for interference from electric and magnetic fields. In combination with the high temperature stability and extremely high linearity, this enables precise measurement results even under challenging environmental conditions. The sensors are easy to install using a circumferential clamp and have an integrated sensor cable that can be extended using an additional standard sensor cable.
Characteristics
- Measuring ranges (mm): 1 | 2 | 5 | 10
- Linearity from 0.5 µm
- Resolution from 10 nm
- Large temperature range -50 ... +800 °C
- Target from Ø 8 mm
Downloads
Robust sensors for challenging environments
Capacitive CSH/SE or CSH/FL/SE sensors are designed for challenging environments characterized by, e.g., extremely low temperatures or strong magnetic fields. They are also ideal for cleanrooms and ultra-high vacuum applications. The sensors are available both in a cylindrical design (CSH/SE) and as a flat sensor (CSH/FL/SE).
Characteristics
- Measuring ranges (mm): 0.2 | 0.5 | 1 | 1.2 | 2 | 3 | 5
- Linearity from 0.25 µm
- Resolution from 0.075 nm
- Temperature range -270 ... +200 °C
- For challenging environments such as ultra-low temperatures, cleanrooms, UHV or strong magnetic fields
Downloads
Data Sheet capaNCDT CSH/SE / capaNCDT CSH/FL/SE
Ultra-compact sensors for confined installation spaces
Micro-Epsilon offers extremely compact capacitive sensors for integration in confined spaces. Whether cylindrical sensors with a diameter of only 3 mm, very flat sensors with a thickness of 0.35 mm or flexible PCB versions, hardly any space is required at the measuring point. In addition, the measuring range starts directly at the sensor, which saves additional installation space.
Triaxial design with maximum signal stability
Micro-Epsilon capacitive sensors have a triaxial design that clearly distinguishes them from conventional sensors. An integrated guard ring creates a very homogeneous measuring field and forms the basis for extremely precise measurements with high signal stability. An electrically shielded sensor cable minimizes external interference and ensures a particularly low-noise and reliable measurement signal.
The right sensor for your measurement task
Micro-Epsilon offers a leading sensor portfolio with numerous models. Depending on the installation situation, cylindrical sensors, flat sensors, sensors with integrated thread or flexible PCB sensors are available. Due to optimized housing and potting materials, the capacitive sensors can be integrated into almost any environment:
- Special alloys (e.g. Inconel) for high temperatures
- Stainless steel for cleanroom/vacuum
- Titanium for use in strong magnetic fields
- Invar for maximum temperature stability
Extension and reduction of the measuring range
To increase flexibility in use, the measuring ranges can be extended or reduced by a factor (e.g. 0.5 or 2) through factory calibration. This allows existing sensor designs to be used for larger measuring ranges or to improve measurement accuracy by reducing the measuring range.
Accessories for vacuum and thickness measurement
An extensive range of accessories enables the sensors to be optimally adapted to a wide variety of applications. This includes vacuum components such as feedthroughs and vacuum-compatible sensor cables as well as customized cable lengths and extensions for special measurement tasks. For two-sided thickness measurement, an optional mounting bracket enables a multi-track solution that can also be calibrated if required. In addition, air purge attachments for gap sensors support reliable use in demanding environments.