Checking the tilt angle of lens carriers

Capacitive displacement sensors measure the tilt angle of lens carriers to nanometer accuracy. Thanks to the high-precision measurement, a repeatable projection is ensured. Several sensors measure onto the metallic carrier. Their extremely high resolution enables precise wafer exposure.

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg
info@micro-epsilon.de
+49 8542 / 168 - 0
+49 8542 / 168 - 90