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interferoMETER 5200-TH

High-precision thickness measurements of the thinnest layers

Materials as thin as 1 µm

Sub-nanometer resolution

White light interferometer for reliable thickness measurement with submicron accuracy

The new IMS5200-TH white light interferometer opens up new possibilities for fast and reliable thickness measurements. The controller features intelligent evaluation and enables precise thickness measurement of transparent layers as thin as 1 µm. Their high measuring rate up to 24 kHz makes the IMS5200 models ideal for industrial use. Nanometer accuracy for layers as thin as 1 µm.

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Characteristics

  1. Measuring rate up to 24 kHz for fast, stable measurements
  2. Easy integration due to large operating range
  3. Precise coating thickness measurement: 1 µm to 100 µm
  4. Multi-peak: multi-layer measurement up to 5 layers possible
  5. Industry-optimized sensor with robust metal housing
  6. Can be used in a vacuum
  7. Simple configuration via web interface
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For air gap measurement between two glass plates (n~1), the measuring range is 1.5 µm ... 150 µm. For glass thickness measurement (with refractive index ~1.5), it is 1 µm to 100 µm.

Reliable thickness measurement with varying measurement distances

The IMS5200-TH white light interferometer is used for high-precision thickness measurements. A decisive advantage here is the distance-independent measurement, where a nanometer-accurate thickness value is achieved even with moving objects. The measuring range of 1 to 100 µm enables the measurement of thin transparent layers and films.

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Multi-layer thickness measurement

With the multi-peak controller variant, several signal peaks can be evaluated simultaneously. This allows multi-layer thickness measurement of transparent objects and laminated glass. The controller outputs the thickness values with the highest stability regardless of their position.

Ideal for industrial environments

The robust sensor and the controller in a metal housing make the system ideally suitable for integration into production lines. With its compact design and large operating range, the sensor is easy to integrate. It provides stable measurement results even in vibrating environments. The controller can be installed in the control cabinet on a DIN rail. Cable lengths up to 10 m allow a spatial separation of sensor and controller. Commissioning and parameterization are conveniently performed via web interface and do not require any software installation.

Numerous models for demanding measurement tasks

Model Measuring range / start of measuring range Linearity Number of measurable layers Application fields
IMS5200-TH26 26 mm ±2 mm / 1 µm to 100 µm < 1 nm 1 layer Fast & reliable inline measurement of thin transparent layers: e.g., film and glass coatings
IMS5200-TH26/VAC
IMS5200MP-TH26 Up to 5 layers