Tilt angle measurement of wafers

The exact position of the wafer plays an important role in wafer handling. During the infeed of wafers, white light interferometers measure the horizontal tilt angle of wafers. Two interferometers measure onto the wafer. White light interferometers from Micro-Epsilon provide absolute distance values at subnanometer resolution. The measurement ensures the greatest possible positional accuracy when picking up and removing wafers.

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg
+49 8542 / 168 - 0
+49 8542 / 168 - 90