reflectCONTROL sensors from Micro-Epsilon use phase-measuring deflectometry to precisely analyze reflective surfaces. A stripe pattern is projected onto the surface and its reflection is captured by two cameras. The sensor calculates a 3D point cloud of the surface structure from the images, making unevenness, scratches and other defects visible. The sensor can be integrated in a stationary manner or moved over the target on the robot. Localized abnormalities or defects are evaluated and displayed in the CAD data.
The RCS130-160 3D HLP is specially designed for measurement and inspection tasks in production lines and has a GigE Vision interface. This provides GenICam-compliant data, enabling seamless integration into existing image processing systems.
Due to the improved camera arrangement, the sensor delivers sharper 2D images than its predecessor model as well as a 3D representation of highly reflective surfaces. It can be used to determine the topology of the components (e.g. flatness, deflection and curvature). The high z-axis resolution in the nanometer range and the excellent repeatability of < 1 µm allow the sensor to output up to 5 million 3D data points.
reflectCONTROL sensors can be used in semiconductor production, for example – where they can detect the exact shape of a wafer. The sensors are also ideal for the automotive industry: Even the smallest surface defects of less than 1 μm can be detected precisely and reliably during the surface inspection of painted attachments.
Furthermore, the reflectCONTROL sensors can be used together with the Micro-Epsilon 3DInspect software. The software transmits the measurement data from the sensor to a PC via Ethernet and visualizes it in 3D. These 3D data are processed further, evaluated and assessed with 3DInspect and, if necessary, logged and transmitted to a control unit. The 3D data can also be saved.
- Distance Sensors
- Inductive sensors (eddy current)
- Configurator
- eddyNCDT 3001
Compact eddy current sensors with integrated controller - eddyNCDT 3005
Miniature sensor system for integration into machines and systems - eddyNCDT 3020
![eddyNCDT 3020 Inductive sensors (eddy current)]()
- eddyNCDT 3060/3070
High-performance sensor system for industrial applications - eddyNCDT 3300
Ideal für schnelle Messaufgaben - SGS 4701 Spindle Growth System
![SGS 4701 Spindle Growth System Inductive sensors (eddy current)]()
- Specific sensors
![Specific sensors Inductive sensors (eddy current)]()
- Capacitive sensors
- Sensor configurator
- capaNCDT 6110
Ideal for industrial applications - capaNCDT 61x0/IP
Robust design for industrial applications - capaNCDT 61x4
Active measuring system for long cables - capaNCDT 6200
Ideal for high-precision multi-channel measurements - capaNCDT 6228
Ideal for high-temperature applications - capaNCDT 6500
Ideal for high-precision multi-channel measurements - capaNCDT sensors
![capaNCDT sensors Capacitive sensors]()
- Customer-specific sensors
![Customer-specific sensors Capacitive sensors]()
- combiSENSOR
![combiSENSOR Capacitive sensors]()
- capaNCDT DTV
![capaNCDT DTV Capacitive sensors]()
- capaNCDT MD6-22
![capaNCDT MD6-22 Capacitive sensors]()
- capaNCDT TFG6220
Thickness measurement of electrically conductive films
- Laser sensors
- Configurator
- optoNCDT 1220
Optimized for OEM and series use - optoNCDT 1320
Compact design for precise measurements - optoNCDT 1420
Smart laser sensor for precise measurements - optoNCDT 1900
Innovative laser sensor for Advanced Automation - optoNCDT 2300
Highly dynamic laser sensor for precise measurements - optoNCDT 5500
High-performance laser sensor for high-end applications - Blue Laser Sensors (BL)
Blue Laser sensor for metals and organic materials - Laser Line Sensors (LL)
Ideal for shiny metallic and textured surfaces - Long-range laser sensors
Ideal for large measurement distances - Customer-specific sensors
![Customer-specific sensors Laser sensors]()
- thicknessSENSOR
![thicknessSENSOR Laser sensors]()
- Confocal sensors
- Sensor configurator
- Confocal chromatic sensors
![Confocal chromatic sensors Confocal sensors]()
- confocalDT IFD2411
Compact controller for series applications - confocalDT IFD2410/2415
Compact sensors with integrated controller - confocalDT IFC2411
Compact single-channel controller for industrial series applications - confocalDT IFC2416
Compact single-channel controller for industrial series applications - confocalDT IFC2421/22
Single or dual-channel controller for industrial applications - confocalDT IFC2465/66
One / two-channel controller for fast & precise measurements - Accessories
![Accessories Confocal sensors]()
- Interferometers (white light)
- interferoMETER 5200-TH
Reliable inline measurement of thin layers - interferoMETER 5400-DS
Absolute distance measurement with nanometer accuracy - interferoMETER 5400-TH
Stable thickness measurement with submicrometer accuracy - interferoMETER 5600-DS
Absolute distance measurement with subnanometer accuracy - interferoMETER 5420-TH
High-precision thickness measurement of SI wafers
- interferoMETER 5200-TH
- Laser distance sensors
- optoNCDT ILR1171
High speed sensors also for outdoor applications - optoNCDT ILR3800
High-performance laser distance sensor for industrial applications - optoNCDT ILR104x
Compact and reliable laser distance sensor
- optoNCDT ILR1171
- Inductive sensors (LVDT)
- induSENSOR DTD gauge
Push-button with compact cable controller - induSENSOR DTA gauge
LVDT gauges - induSENSOR DTA sensors
LVDT displacement sensors - induSENSOR LDR
Linear displacement sensors - Clamping stroke sensor
Sensors for monitoring the clamping position - MSC7x0x controller
![MSC7x0x controller Inductive sensors (LVDT)]()
- induSENSOR EDS
Long-stroke sensors with integrated electronics - Inductive sensors for specific applications
![Inductive sensors for specific applications Inductive sensors (LVDT)]()
- induSENSOR DTD gauge
- Magneto-induktive Sensoren
- mainSENSOR MDS-35/-45
Robust sensors with M12, M18 and M30 design - mainSENSOR MDS-40-MK
Sensors for series applications - mainSENSOR MDS-40-LP
Sensors with circuit-board design - Customer-specific sensors
![Customer-specific sensors Magneto-induktive Sensoren]()
- mainSENSOR MDS-35/-45
- Draw-wire sensors
- Draw-wire sensors for serial integration & OEM
Miniature sensors with plastic housing - Industrial draw-wire sensors
Robust sensors with aluminum housing - Draw-wire sensors for fast measurements
For high wire accelerations - Mechanics
Draw-wire mechanisms for encoder mounting
- Draw-wire sensors for serial integration & OEM
- Inductive sensors (eddy current)
- Industry Sensors
- 2D/3D Measurement
- 3D sensors
- Optical precision micrometer
- optoCONTROL 1200
Compact high-speed micrometer - optoCONTROL 2520
Compact laser micrometer (class 1M) - optoCONTROL 2700
High-performance micrometer for the highest demands
- optoCONTROL 1200
- Laser profile scanners
- Configurator
- scanCONTROL 25x0
Laser scanner for series applications - scanCONTROL 29x0
Compact laser scanners with high precision - scanCONTROL 30x2
Powerful 2D/3D laser scanners - scanCONTROL 30x0
High-performance laser scanners - Software
- Options & Accessories
![Options & Accessories Laser profile scanners]()
- Applications
![Applications Laser profile scanners]()
- Measuring systems
- Sensor systems for precise 3D and thickness measurement
- thicknessGAUGE 3D
Inline thickness and profile measurements - thicknessGAUGE C.LL
Inline thickness measurement (laser sensors) - thicknessGAUGE C.C
Inline thickness measurement (confocal) - thicknessGAUGE C.LP
Inline-Dickenmessung (Laser-Profilsensoren) - thicknessGAUGE O.EC
Inline thickness measurement (eddy current/capacitive)
- thicknessGAUGE 3D
- Measuring and inspection systems for metals
- Measuring and inspection systems for the automotive industry
- Measuring systems for the battery production
- Inspection and production systems for the tire industry
- Gauges and inspection systems for plastics
- Sensor systems for precise 3D and thickness measurement
- OEM
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- Structural monitoring & Building material production
- Electronics production
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- Paint inspection
- Machine building
- Medical technology
- Metrology & Testing technology
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